MIM Capacitors With Crystalline-$\hbox{TiO}_{2}/ \hbox{SiO}_{2}$ Stack Featuring High Capacitance Density and Low Voltage Coefficient

✍ Scribed by Wu, Yung-Hsien; Ou, Wei-Yuan; Lin, Chia-Chun; Wu, Jia-Rong; Wu, Min-Lin; Chen, Lun-Lun

• Book ID: 121352960
• Publisher: IEEE
• Year: 2012
• Tongue: English
• Weight: 379 KB
• Volume: 33
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2011.2173791