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Microwave plasma synthesis of TiN and ZrN nanopowders

โœ Scribed by Joseph Lik Hang Chau; Chih Chun Kao


Book ID
113790419
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
842 KB
Volume
61
Category
Article
ISSN
0167-577X

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ZrN and TiN films have been deposited on Si substrates without additional heating using plasma based ion implantation & deposition (PBII&D) with pulse voltage from 0 to 5 kV. High quality columnar films have been obtained in both systems with a slight nitrogen deficiency. For ZrN, a marked reduction