Microwave mobility in profiled poly-Si thin films deposited on glass by hot-wire CVD

✍ Scribed by P.A.T.T. van Veenendaal; T.J. Savenije; J.K. Rath; R.E.I. Schropp

• Book ID: 114085442
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 199 KB
• Volume: 403-404
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(01)01654-6