Microvoids and defect chemistry at the Si-SiO2 interface studied by positron annihilation depth profiling : G. W. A. Rubloff, B. Nielsen, K. G. Lynn, D. O. Welch and T. C. Leung. Vacuum 41(4), 790 (1990)

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 127 KB
• Volume: 31
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(91)90456-h