✦ LIBER ✦

Microtopographic analysis of turned surfaces by model-based scatterometry

✍ Scribed by A Hertzsch; K Kröger; H Truckenbrodt

Book ID: 108400585
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 268 KB
Volume: 26
Category: Article
ISSN: 0141-6359
DOI: 10.1016/s0141-6359(02)00116-2

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