Microsystem Design

✍ Stephen D. Senturia 📂 Library 📅 2000 🏛 Springer 🌐 English

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise,

Microsystem Design

📁 Microsystem Design

✍ Stephen D. Senturia (auth.) 📂 Library 📅 2002 🏛 Springer US 🌐 English

<p>It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of m

Microsystem Design

📁 Microsystem Design

✍ Stephen D. Senturia 📂 Library 📅 2000 🏛 Springer 🌐 English

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and d

Microsystems Mechanical Design

📁 Microsystems Mechanical Design

✍ Eniko T. Enikov (auth.), Francesco De Bona, Eniko T. Enikov (eds.) 📂 Library 📅 2006 🏛 Springer-Verlag Wien 🌐 English

<p>Nowadays, micromechanics (i.e., mechanics of microsystems) is probably one of the most promising and rapidly growing fields among new emerging technologies. In fact, the possibility of reducing the size of mechanical structures to the micro-domain opens a wide variety of possible applications in

Introduction to Microsystem Design

📁 Introduction to Microsystem Design

✍ Werner Karl Schomburg (auth.) 📂 Library 📅 2011 🏛 Springer-Verlag Berlin Heidelberg 🌐 English

Introduction to Microsystem Design

📁 Introduction to Microsystem Design

✍ Werner Karl Schomburg (auth.) 📂 Library 📅 2015 🏛 Springer-Verlag Berlin Heidelberg 🌐 English

<p><p>This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do n