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Microstructures and mechanical properties of thin films of aluminum oxide

โœ Scribed by T.C. Chou; T.G. Nieh; S.D. McAdams; G.M. Pharr


Book ID
117990586
Publisher
Elsevier Science
Year
1991
Weight
417 KB
Volume
25
Category
Article
ISSN
0956-716X

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