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Microstructures and Adhesion of the Oxide Scale Formed on Titanium Aluminum Carbide Substrates

โœ Scribed by Zhijun Lin; Mujin Zhuo; Yanchun Zhou; Meishuan Li; Jingyang Wang

Book ID
109259888
Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
332 KB
Volume
0
Category
Article
ISSN
0002-7820

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Aluminum oxide (Al 2 O 3 ) films were produced on n-type (001) Si, SiO 2 and polyimide (PI) substrates by atomic layer deposition method (ALD). The surface morphologies of the coatings were characterized by XRD and AFM, respectively. The adhesive properties of the deposits were investigated as a fun