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Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen

✍ Scribed by J. Müllerová; P. Šutta; G. van Elzakker; M. Zeman; M. Mikula

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 574 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.10.069

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