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Microstructure and valence bonds of Si-B-C-N-Al powders synthesized by mechanical alloying

✍ Scribed by Dan Ye; Dechang Jia; Zhihua Yang; Yu Zhou

Book ID
119356040
Publisher
Elsevier
Year
2012
Tongue
English
Weight
741 KB
Volume
27
Category
Article
ISSN
1877-7058

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Mo-Al-Si-N films were deposited by reactive magnetron sputtering on substrates of Si wafer, alumina, and stainless steel from composite targets consisting of Mo, Al and Si. To investigate the effect of Al content on the properties of the Mo-Al-Si-N films at a constant Si content of 9 at.%, the chemi