Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C:H films deposited by mid-frequency magnetron sputtering

✍ Scribed by Jiang, Jinlong; Wang, Qiong; Huang, Hao; Wang, Yubao; Zhang, Xia; Hao, Junying

• Book ID: 121506953
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 818 KB
• Volume: 240
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2013.12.067