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Microstructure and hardness of nanocrystalline Ti1−x−yAlxSiyN thin films

✍ Scribed by D. Rafaja; A. Poklad; V. Klemm; G. Schreiber; D. Heger; M. Šíma


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
762 KB
Volume
462
Category
Article
ISSN
0921-5093

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## Sol-gel method A B S T R A C T Ba(Ti 1Àx ,Ni x )O 3 thin films were prepared on fused quartz substrates by a sol-gel process. X-ray diffraction and Raman scattering measurements showed that the films are of pseudo-cubic perovskite structure with random orientation and the change of lattice cons