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Comparison of amorphous and crystalline (Ti,Nb)O2 thin films: Crystallization microstructure and electrical properties

✍ Scribed by F. Picard-Lagnel; B. Poumellec; C. Picard

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 592 KB
Volume: 174
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90891-2

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## Abstract GeO~2~ thin films were prepared by sol‐gel method on ITO/Glass substrate. The electrical and optical properties and the microstructures of these films were investigated with special emphasis on the effects of an annealing treatment in ambient air. The films were annealed at various temp