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Microstructure and electrical properties of perovskite (Pb, La)TiO3 thin film deposited at low temperature by the polymeric precursor method

✍ Scribed by F. M. Pontes; J. H. G. Rangel; E. R. Leite; E. Longo; J. A. Varela; E. B. Araújo; J. A. Eiras

Book ID
110367693
Publisher
Springer
Year
2001
Tongue
English
Weight
287 KB
Volume
36
Category
Article
ISSN
0022-2461

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## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra