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Microstructural evolution of a-Si:H prepared using hydrogen dilution of silane studied by real time spectroellipsometry

✍ Scribed by Joohyun Koh; H Fujiwara; R.W Collins; Yeeheng Lee; C.R Wronski


Book ID
117148748
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
120 KB
Volume
227-230
Category
Article
ISSN
0022-3093

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