✦ LIBER ✦
Real time infrared reflectance spectroscopy: A study of hydrogen incorporation and release during a-Si:H growth by reactive magnetron sputtering
✍ Scribed by M. Katiyar; G.F. Feng; Y.H. Yang; N. Maley; J.R. Abelson
- Book ID
- 115988957
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 295 KB
- Volume
- 164-166
- Category
- Article
- ISSN
- 0022-3093
No coin nor oath required. For personal study only.