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Microstructural and compositional characterization of TiW/Al(0.8%Si)/TiW/PtSi/(100)Si

✍ Scribed by A. Ashkenazi; Y. Komen; I. Lerner

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 861 KB
Volume: 65-66
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90749-2

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