Microscopic surface contouring by fringe projection method

✍ Scribed by C Quan; C.J Tay; X.Y He; X Kang; H.M Shang

• Book ID: 104159742
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 443 KB
• Volume: 34
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(02)00070-1

✦ Synopsis

This paper describes the use of optical fringe projection method for 3D surface proÿle and deformation measurement of micro-components. In this method, sinusoidal linear fringes are projected on a micro-component surface by a grating phase shifting projector and a long working distance microscope (LWDM). The image of the fringe pattern is captured by a high-resolution CCD camera and another LWDM and processed by phase-shifting technique. A simple procedure is described which enables calibration of the optical set-up for subsequent quantitative measurement of micro-components of unknown shapes. This method is relatively simple and accurate, and is capable of conducting fully automated measurements. In this paper, two micro-components, a micro-mirror (0:1 mm × 0:1 mm) and a micro-electrode pad are used to demonstrate deformation measurement and microscopic surface contouring.