Microscopic observation of lateral diffusion at Si–SiO2 interface by photoelectron emission microscopy using synchrotron radiation

✍ Scribed by N. Hirao; Y. Baba; T. Sekiguchi; I. Shimoyama; M. Honda

• Book ID: 116244399
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 406 KB
• Volume: 258
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2011.04.047