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Microscale investigation of surface contaminations during silicon epitaxial growth

✍ Scribed by Patsch, Brigitte ;Ehlert, Andreas ;Kirchner, Ralf ;Puppe, Günther ;Lankmayr, Ernst

Publisher: Springer-Verlag
Year: 2008
Weight: 317 KB
Volume: 164
Category: Article
ISSN: 0344-838X
DOI: 10.1007/s00604-008-0080-8

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