✦ LIBER ✦

Investigation of surface contamination on silicon wafers with SIMS

✍ Scribed by G. Stingeder; M. Grundner; M. Grasserbauer

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Quantitative analysis of surface contami

✍ P. Rostam-Khani; J. Philipsen; E. Jansen; H. Eberhard; P. Vullings 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 253 KB

Analysis of amine contamination on silic

✍ D Lu; Z.-Q Mo; Z.-X Xing; D Gui 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 137 KB

Ion implanters contamination on wafer su

✍ R. Ricciari; M. Bertini; E.P. Ferlito; G. Pizzo; G. Anastasi; D. Mello; G. Franc 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 185 KB

Use of spin-coated TXRF reference sample

✍ Paolo Lazzeri; Alberto Lui; Lorenza Moro; Lia Vanzetti 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 162 KB

Investigation of surface amorphization o

✍ T. Schuhrke; M. Mändl; J. Zweck; H. Hoffmann 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 443 KB

Investigation of anodic silicon-oxide su

✍ N Klaus; IL Baranow 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 410 KB