Use of spin-coated TXRF reference samples for ToF-SIMS metal contaminant quantification on silicon wafers

✍ Scribed by Paolo Lazzeri; Alberto Lui; Lorenza Moro; Lia Vanzetti

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 162 KB
• Volume: 29
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/1096-9918(200011)29:11<798::aid-sia934>3.0.co;2-x