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Micro/nano-fabrication technologies for cell biology

✍ Scribed by Tongcheng Qian; Yingxiao Wang

Publisher
Springer
Year
2010
Tongue
English
Weight
376 KB
Volume
48
Category
Article
ISSN
1741-0444

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## Abstract The present work reports on application of gold, nickel, and diamond nano‐particles as a masking material for realization of diamond 3D nano‐structures after a low power (100 W) plasma etching process in a gas mixture of CF~4~/O~2~. Obtained 3D structures strongly depend on the masking