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Micromachined thin film SnO2 gas sensors in temperature-pulsed operation mode

✍ Scribed by M Jaegle; J Wöllenstein; T Meisinger; H Böttner; G Müller; T Becker; C Bosch-v.Braunmühl


Book ID
108470049
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
295 KB
Volume
57
Category
Article
ISSN
0925-4005

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In this work the results of photoconductivity measurements on SnO 2 thin films gas sensors grown by the rheotaxial growth and thermal oxidation (RGTO) technique are presented. It is shown that thin films, illuminated with UV light at room temperature, become sensitive to oxygen and reducing gases li