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Laser annealing of SnO2 thin-film gas sensors in single chip packages

✍ Scribed by Klau Steiner; Gerd Sulz; Eugen Neske; Elmar Wagner

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
343 KB
Volume
26
Category
Article
ISSN
0925-4005

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Photosensitivity activation of SnO2 thin
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✍ P. Camagni; G. Faglia; P. Galinetto; C. Perego; G. Samoggia; G. Sberveglieri πŸ“‚ Article πŸ“… 1996 πŸ› Elsevier Science 🌐 English βš– 294 KB

In this work the results of photoconductivity measurements on SnO 2 thin films gas sensors grown by the rheotaxial growth and thermal oxidation (RGTO) technique are presented. It is shown that thin films, illuminated with UV light at room temperature, become sensitive to oxygen and reducing gases li