Micromachined RF passive components and their applications in MMICs

✍ Scribed by Yanling Sun; Joseph L. Tauritz; Roel G. F. Baets

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 383 KB
• Volume: 9
• Category: Article
• ISSN: 1096-4290
• DOI: 10.1002/(sici)1099-047x(199907)9:4<310::aid-mmce3>3.0.co;2-9

✦ Synopsis

The design, fabrication, and characterization of micromachined RF passive components, including spiral inductors, Q-and L-enhanced inductors, and MIM capacitors, monolithically realized on suspended membranes in an f T ‫؍‬ 15 GHz silicon bipolar process (DIMES-03) are described. The performance of active inductors, active resonators, and oscillators incorporating suspended-membrane components is compared to that of conventional MMIC circuit realization.