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Microelectromechanical capacitors for RF applications

✍ Scribed by Nieminen, H; Ermolov, V; Nybergh, K; Silanto, S; Ryhänen, T


Book ID
121270882
Publisher
Institute of Physics
Year
2002
Tongue
English
Weight
653 KB
Volume
12
Category
Article
ISSN
0960-1317

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