✦ LIBER ✦
Strain- and pressure-dependent RF response of microelectromechanical resonators for sensing applications
✍ Scribed by Brueckner, K; Cimalla, V; Niebelschütz, F; Stephan, R; Tonisch, K; Ambacher, O; Hein, M A
- Book ID
- 126310288
- Publisher
- Institute of Physics
- Year
- 2007
- Tongue
- English
- Weight
- 403 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0960-1317
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