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Microcalorimeters for broad band high resolution X-ray spectral analysis

โœ Scribed by Mark LeGros; Eric Silver; Norman Madden; Jeffrey Beeman; Frederick Goulding; Donald Landis; Eugene Haller


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
291 KB
Volume
345
Category
Article
ISSN
0168-9002

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Broadband, high-resolution x-ray spectra from samples excited by the electron beam of a scanning electron microscope were obtained with an NTD germanium-based microcalorimeter. An energy resolution of 8 eV was used to resolve completely the silicon Ka from the tungsten Ma x-rays. This performance wi