Microbolometers: Fundamentals, Materials, and Recent Developments

✍ Scribed by Nuggehalli Ravindra

• Publisher: Woodhead Publishing
• Year: 2021
• Tongue: English
• Leaves: 342
• Series: Woodhead Publishing Series in Electronic and Optical Materials
• Edition: 1
• Category: Library

✦ Synopsis

Microbolometers: Fundamentals, Materials, and Recent Developments describes the fundamentals of microbolometers, their historic evolution, operational principles and material choices. It also explains the impact of materials on the processing and development of device characteristics. Sections address various aspects of optical properties and recommend models of properties of materials of interest for the fabrication of the uncooled microbolometers. In addition, the book presents two case studies, Honeywell and Texas Instruments, that focus on the design and manufacture of microbolometers.

Finally, recent developments, applications, patents and future trends are presented. The chapter on patents will summarize the strengths and weaknesses of each of the technologies.

“Please note that there is an error on the Dedication page, it should read: “To my sister, Math. G.Y. Premalatha, and my brother-in-law, the late Professor G.N. Yoganarasimhan, Professor of Water Resources Engineering and Management, for showing me the direction”

• Describes the fundamentals of uncooled infrared detectors, operational principles and material approaches
• Includes case studies based on Honeywell and Texas Instruments’ work on microbolometers
• Provides analyses of current patents with a look towards their strengths and weaknesses

✦ Table of Contents

Front matter
Copyright
Contents
Preface
Online appendices
Appendix A: Honeywell approach
Appendix B: Texas Instruments approach
Appendix C: Patents
References
Acknowledgments
Dedication
About the Author
1---Historical-perspective_2022_Microbolometers
Historical perspective
Infrared radiation
Infrared detector
Microbolometer
Fabrication process
References
2---Introduction_2022_Microbolometers
Introduction
Electromagnetic (EM) radiation
Infrared radiation
Applications
Microbolometers
Radiometry and black body radiation
Optical imaging system
Infrared radiation transmission in Earths atmosphere
References
3---Figure-of-merit_2022_Microbolometers
Figure of merit
Introduction
Thermal detector heat-balance equation
System noise
Figures of merit
Optical infrared imaging system
References
4---Infrared-detector-materials_2022_Microbolometers
Infrared detector materials
Introduction
Photon detectors
Microbolometers
Amorphous silicon
Vanadium oxide
Black metals as infrared absorbers: Integration with microbolometers, polycrystalline silicon, black silicon, pyroel ...
References
5---Other-materials_2022_Microbolometers
Other materials
Introduction
HgCdTe
Silicon-germanium
2D materials including graphene
Yttrium barium copper oxide (YBa2Cu3O7-δ)
GaAs
Black silicon
References
6---Optical-and-thermal-detector-fundamentals--microbolometer_2022_Microbolo
Optical and thermal detector fundamentals, microbolometer, and readout integrated circuits
Introduction
Photon detectors versus thermal detectors
Thermal infrared detector
Bolometer-fundamentals
Read-out integrated circuits
References
7---Methods-of-calibration_2022_Microbolometers
Methods of calibration
Introduction
Radiometric calibration methods
References
8---Types-of-microbolometers_2022_Microbolometers
Types of microbolometers
Microbolometer
Microbolometer-principle of operation
Microbolometer structural design
Classification of microbolometers
Methods of microbolometer fabrication
Microbolometer types
References
Further reading
9---Terahertz-microbolometers_2022_Microbolometers
Terahertz microbolometers
Introduction
Classification of terahertz detectors
Terahertz microbolometer detectors
Case studies
RandD, applications and market trends: Update
References
10---Antennas_2022_Microbolometers
Antennas
Introduction
Antenna fundamentals, characteristics, and applications
Antenna-coupled microbolometers
Types of antennas
Terahertz antenna-coupled microbolometer detectors
References
11---Infrared-focal-plane-arrays_2022_Microbolometers
Infrared focal plane arrays
Introduction
Types, materials, and systems
Dual-band IRFPAs
FPA Architectures
InGaAs
HgCdTe arrays
GaAs/AlGaAs quantum well infrared photodetector (QWIP)
Uncooled focal plane arrays
References
12---A-case-study-of-an-uncooled-microbolometer_2022_Microbolometers
A case study of an uncooled microbolometer
Introduction
Microbolometer: Materials selection
P-silicon as thermosensing material
Radiative properties of thin films of common dielectric materials
Dielectric materials as infrared filters
Silicon nitride as IR radiation absorber
Microbolometer: Electrical interconnection and IR reflective layer
Optical constants of microbolometer materials
Microbolometer structural design
Optimization of radiative properties of layers in the microbolometer
Numerical simulations of performance of microbolometer
Figures of merit
NETD of microbolometer
Numerical calculations of improved microbolometer
Figures of merit of improved microbolometer
NETD of improved microbolometer
Concluding remarks
References
13---Present-and-future-trends_2022_Microbolometers
Present and future trends
Present and future trends in infrared detectors and infrared imaging
Microbolometer-based infrared detector technology: Challenges and trends
References
14---Applications_2022_Microbolometers
Applications
Infrared detector applications
Applications of microbolometers
Examples of applications of microbolometers
References
Index
A
B
C
D
E
F
G
H
I
J
L
M
N
O
P
R
S
T
U
V
W
Y
Z