Micro-structuring of thick NdFeB films using high-power plasma etching for magnetic MEMS application

✍ Scribed by Jiang, Yonggang; Masaoka, Shingo; Uehara, Minoru; Fujita, Takayuki; Higuchi, Kohei; Maenaka, Kazusuke

• Book ID: 126253669
• Publisher: Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 921 KB
• Volume: 21
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/21/4/045011