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Micro-structures fabrication on glasses for micro-fluidics by imprinting technique

โœ Scribed by Qiuping Chen; Qiuling Chen; Daniel Milanese; Monica Ferraris

Book ID
106185756
Publisher
Springer-Verlag
Year
2009
Tongue
English
Weight
311 KB
Volume
15
Category
Article
ISSN
0946-7076

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โœ Harutaka Mekaru; Tomoyuki Tsuchida; Jun-ichi Uegaki; Manabu Yasui; Michiru Yamas ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 701 KB

We fabricated micro lenses on a Pyrex glass using thermal nanoimprint technology. The mold material employed to imprint on the Pyrex glass was a Ni/Ti/Si substrate electroless-plated with an amorphous Ni-P alloy. The fabrication of the mold involved high precision FIB processing. In this technique w