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Micro-Raman study of iridium silicides

✍ Scribed by A. Almendra; A. Rodríguez; T. Rodríguez; P. Martín; J. Jiménez

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 110 KB
Volume: 33
Category: Article
ISSN: 0377-0486
DOI: 10.1002/jrs.824

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## Abstract Micro‐Raman studies were performed on ion‐irradiated oxidized silicon surfaces with different ion energies, ion fluences and subsequent hydrogenation to determine the efficacy and sensitivity for obtaining information on the degree of ion beam‐induced damage in very thin (__ca.__ 100 Å)