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Micro-machined gas sensor array based on metal film micro-heater

✍ Scribed by Yaowu Mo; Yuzo Okawa; Motoshi Tajima; Takehito Nakai; Nobuyuki Yoshiike; Kazuki Natukawa

Book ID
108469408
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
295 KB
Volume
79
Category
Article
ISSN
0925-4005

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✍ Wan-Young Chung; Jun-Woo Lim πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 315 KB

Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro-gas senso