Micro-humps formed in excimer laser ablation of polyimide using mask projection system

✍ Scribed by J. Gu; E. Tay; P.K. Lim; P. Lim

• Book ID: 106024217
• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 175 KB
• Volume: 74
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390101042