Micro fluidic control systems in deep etch optical lithography

✍ Scribed by N. Pye; M. McCormick; E. G. Chowaneitz; M. Harper; M. Goodwin

• Publisher: Springer-Verlag
• Year: 1998
• Tongue: English
• Weight: 228 KB
• Volume: 4
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s005420050130