Micro-Electronic and Mechanical Systems
β Scribed by K. Takahata
- Publisher
- In-Teh
- Year
- 2009
- Tongue
- English
- Leaves
- 524
- Category
- Library
No coin nor oath required. For personal study only.
β¦ Synopsis
This book discusses key aspects and the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field.
β¦ Table of Contents
Preface&Contents_Micro_Electronic_and_Mechanical_Systems......Page 1
01_Ikeuchi......Page 11
02_Gould......Page 25
03_Kim......Page 35
04_Djinovic......Page 61
05_Matovic......Page 71
06_Jaksic......Page 95
07_Isobe......Page 117
08_Khan......Page 123
09_Noda......Page 135
10_Takahata......Page 153
11_Stanimirovic_Z......Page 175
12_Stanimirovic......Page 187
13_Grigoriev......Page 195
14_Shtereva......Page 221
15_Eng......Page 245
16_Chetibi......Page 255
17_Zemliak......Page 277
18_Kolaklieva......Page 303
19_Dankovic......Page 329
20_Loncar......Page 353
21_Stosovic......Page 379
22_Andrejevic_Stosovic......Page 395
23_Roy......Page 415
24_Fummi......Page 441
25_Milic......Page 465
26_Markoski......Page 487
27_Delic......Page 503
π SIMILAR VOLUMES
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolut