It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process
Micro Electro Mechanical Systems
β Scribed by Qing-An Huang
- Publisher
- Springer Singapore
- Year
- 2018
- Tongue
- English
- Leaves
- 1470
- Series
- Micro/Nano Technologies
- Edition
- 1st ed.
- Category
- Library
No coin nor oath required. For personal study only.
β¦ Subjects
Engineering; Mechatronics; Nanotechnology and Microengineering; Electronics and Microelectronics, Instrumentation; Microwaves, RF and Optical Engineering
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