✦ LIBER ✦

Micro-electromechanical Systems for Nano-science

✍ Scribed by U. Staufer; C. Beuret; S. Gautsch; W. Noell; G. Schüurmann; C. Stebler; N.F. de Rooij

Book ID: 110285129
Publisher: Springer Netherlands
Year: 2000
Tongue: English
Weight: 106 KB
Volume: 2
Category: Article
ISSN: 1388-0764
DOI: 10.1023/a:1010026531885

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