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Micro-electromechanical systems based on 3C-SiC/Si heterostructures

✍ Scribed by Ch. Förster; V. Cimalla; K. Brückner; M. Hein; J. Pezoldt; O. Ambacher

Book ID: 104064002
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 513 KB
Volume: 25
Category: Article
ISSN: 0928-4931
DOI: 10.1016/j.msec.2005.07.016

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