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Metrology of multilayer Laue lens structures by means of scanning electron microscope imaging

✍ Scribed by N. Jahedi; R. Conley; B. Shi; J. Qian; K. Lauer; A. Macrander

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 613 KB
Volume: 616
Category: Article
ISSN: 0168-9002
DOI: 10.1016/j.nima.2009.11.015

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