Metrology method for the correlation of line edge roughness for different resists before and after etch

✍ Scribed by S. Winkelmeier; M. Sarstedt; M. Ereken; M. Goethals; K. Ronse

• Book ID: 114155270
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 871 KB
• Volume: 57-58
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00458-0