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Metrological atomic force microscope using a large range scanning dual stage

✍ Scribed by Jong-Ahn Kim; Jae Wan Kim; Chu-Shik Kang; Tae Bong Eom

Book ID: 107662219
Publisher: Korean Society for Precision Engineering
Year: 2009
Tongue: English
Weight: 544 KB
Volume: 10
Category: Article
ISSN: 1229-8557
DOI: 10.1007/s12541-009-0087-z

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