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Methods for computer simulation of crystal sputtering

✍ Scribed by E. Yu. Zykova; A. S. Mosunov; V. E. Yurasova


Book ID
110195958
Publisher
SP MAIK Nauka/Interperiodica
Year
2008
Tongue
English
Weight
204 KB
Volume
48
Category
Article
ISSN
0965-5425

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