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Computer simulation of sputtering of polycrystalline materials

✍ Scribed by G. Betz; R. Dobrozemsky; F.P. Viehböck

Publisher: Elsevier Science
Year: 1971
Weight: 713 KB
Volume: 6
Category: Article
ISSN: 0020-7381
DOI: 10.1016/0020-7381(71)85022-2

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