Method of forming an iron oxide film by reacting sputtering with control of a glow discharge by monitoring an emission spectrum of iron from the glow d

✍ Scribed by Lerch, Markus M.; Griesbacher, Thomas; Whitcomb, David C.

• Book ID: 122456441
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 103 KB
• Volume: 43
• Category: Article
• ISSN: 0584-8547
• DOI: 10.1016/0584-8547(88)80098-3