4704199 Method of forming an iron oxide film by reacting sputtering with control of a glow discharge by monitoring an emission spectrum of iron from the glow discharge

✍ Scribed by Toshi Yokokawa; Yohichi Hirukawa

• Book ID: 108007433
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 98 KB
• Volume: 44
• Category: Article
• ISSN: 1386-1425
• DOI: 10.1016/0584-8539(88)80048-5