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Method for measuring wave parameters in films from electric signal detection

✍ Scribed by I. V. Simonov; I. M. Smirnov


Book ID
111449039
Publisher
Springer
Year
2011
Tongue
English
Weight
209 KB
Volume
56
Category
Article
ISSN
1063-7842

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This article reports an in situ approach to studying acid loss from polymer (films of the type used in microlithiography. We developed a method which makes use of the dye coumarin 6 (C6) which has absorption characteristics which change dramatically as a result of acid-induced changes in its prototr