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Metastable TiSixNyOz films of B1-type structure prepared by the arc process

✍ Scribed by M.V. Kuznetsov; E.V. Shalaeva; S.V. Borisov; B.V. Mitrofanov; A.L. Ivanovsky

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 994 KB
Volume: 279
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)08144-5

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