Investigation of the atomic interdiffusi
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Markwitz, A.; Matz, W.; Waldschmidt, M.; Demortier, G.
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Article
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1998
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John Wiley and Sons
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English
⚖ 953 KB
Ion beam-induced interdi †usion and phase formation processes in thin Cu-Al and Ag-Al multilayers were investigated with in situ RBS and X-ray di †raction (XRD), respectively. The metal layers were deposited by evaporation on polished glassy carbon and single-crystal silicon substrates. In order to